Selective Deposition of Multiple Sensing Materials on Si Nanobelt Devices through Plasma-Enhanced Chemical Vapor Deposition and Device-Localized Joule Heating

Ru Zheng Lin, Kuang Yang Cheng, Fu-Ming Pan, Jeng-Tzong Sheu*

*此作品的通信作者

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds