Selective deposition of gold particles on dip-pen nanolithography patterns on silicon dioxide surfaces

Jeng-Tzong Sheu*, Chia Hao Wu, Tien-Sheng Chao

*此作品的通信作者

研究成果: Article同行評審

8 引文 斯高帕斯(Scopus)

摘要

We report a novel platform to perform selective deposition of gold nanoparticles on dip-pen nanolithographic patterns on SiO2 surfaces. An "inked" atomic force microscope (AFM) tip was adopted to deposit 2.2 mM organic N-(2-aminoethyl)-3-aminopropyltrimethoxysilane (AEAPTMS) molecules in nanopatterns through a water meniscus onto a SiO2 substrate under ambient conditions; the molecules act as linkers for the selective deposition of gold nanoparticles on the SiO2 surface. Conditions for dip-pen nanolithography of organic nanopatterns of AEAPTMS were investigated. In addition, gold nanoparticles with negatively-charged citrate surfaces were deposited selectively on top of the organic patterns. X-ray photoelectron spectroscopy was then used to evaluate the presence of gold nanoparticles on the SiO2 surface. Lateral force microscopy was utilized to differentiate the surface between oxidized semiconductors and patterned areas with monolayer of AEAPTMS. Linewidths down to 60nm have been successfully achieved by this method.

原文English
頁(從 - 到)3693-3697
頁數5
期刊Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
45
發行號4 B
DOIs
出版狀態Published - 25 4月 2006

指紋

深入研究「Selective deposition of gold particles on dip-pen nanolithography patterns on silicon dioxide surfaces」主題。共同形成了獨特的指紋。

引用此