Robust control of a two-axis piezoelectric nano-positioning stage

Fu Cheng Wang*, Yan Chen Tsai, Chin Hui Hsieh, Lian Sheng Chen, Chung Huang Yu

*此作品的通信作者

研究成果: Conference contribution同行評審

8 引文 斯高帕斯(Scopus)

摘要

This paper applies robust control to a two-axis piezoelectric nano-positioning stage. As technology develops, the precision requirement for positioning platforms is becoming increasingly stringent. Since a traditional mechanical transmission structure cannot achieve high precision, a piezoelectric actuator is usually applied to drive the mechanism because of its high resolution, high accuracy, and large driving force. However, the non-linear dynamic characteristics of piezoelectric materials, such as hysteresis, might degrade system performance. Therefore, in the present study, we model a piezoelectric stage as a linear system, and regard the nonlinear factors as system uncertainties. We then apply robust control strategies to guarantee system stability and performance. Lastly, the designed controllers are implemented for experimental verification. The results demonstrate the effectiveness of these robust controllers.

原文English
主出版物標題Proceedings of the 18th IFAC World Congress
發行者IFAC Secretariat
頁面3539-3544
頁數6
版本1 PART 1
ISBN(列印)9783902661937
DOIs
出版狀態Published - 2011

出版系列

名字IFAC Proceedings Volumes (IFAC-PapersOnline)
號碼1 PART 1
44
ISSN(列印)1474-6670

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