Rib-type polyimides and polyimide-silica hybrid arrayed waveguide grating simulation and fabrication

Wen Jen Liu*, Yi Tsen Lai, Yin-Chieh Lai, Min Hang Weng, Chih Min Chen

*此作品的通信作者

研究成果: Conference article同行評審

摘要

Rib-type structures formed by layers of polyimides and polyimide-silica hybrid materials with better thermal stability and mechanical strength in polymer materials were presented. Polyimides and polyimide-silica hybrid arrayed waveguide grating (AWG) devices indicated the insertion loss to be -3.12 dB and -3.16 dB. Optical measurements of polyimides and polyimide-silica hybrid materials formed on quartz glass indicated the refractive indexes of top cladding/core/bottom cladding layers at 1550 nm wavelength were 1.522/1.546/1.522 and 1.4907/1.53/1.4907. The extinction of coefficients of all samples exhibited zero at 1550 nm wavelength.

原文English
文章編號42
頁(從 - 到)297-306
頁數10
期刊Proceedings of SPIE - The International Society for Optical Engineering
5723
DOIs
出版狀態Published - 21 7月 2005
事件Optical Components and Materials II - San Jose, CA, United States
持續時間: 24 1月 200525 1月 2005

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