Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

Fu Ken Liu; Yu Cheng Chang; Fu-Hsiang Ko; Tieh Chi Chu; Bau Tong Dai

doi:10.1016/S0167-9317(03)00175-8

Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

Fu Ken Liu^*, Yu Cheng Chang, Fu-Hsiang Ko, Tieh Chi Chu, Bau Tong Dai

^*此作品的通信作者

材料科學與工程學系

研究成果: Conference article › 同行評審

66 引文斯高帕斯（Scopus）

摘要

This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method.

原文	English
頁（從 - 到）	702-709
頁數	8
期刊	Microelectronic Engineering
卷	67-68
DOIs	https://doi.org/10.1016/S0167-9317(03)00175-8
出版狀態	Published - 6月 2003
事件	Proceedings of the 28th International Conference on MNE - Lugano, Switzerland 持續時間: 16 9月 2002 → 19 9月 2002

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10.1016/S0167-9317(03)00175-8

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title = "Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method",

abstract = "This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method.",

keywords = "Gold nanoparticles, Rapid fabrication, Self-assembled, Spin coating",

author = "Liu, {Fu Ken} and Chang, {Yu Cheng} and Fu-Hsiang Ko and Chu, {Tieh Chi} and Dai, {Bau Tong}",

year = "2003",

month = jun,

doi = "10.1016/S0167-9317(03)00175-8",

language = "English",

volume = "67-68",

pages = "702--709",

journal = "Microelectronic Engineering",

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note = "Proceedings of the 28th International Conference on MNE ; Conference date: 16-09-2002 Through 19-09-2002",

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TY - JOUR

T1 - Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

AU - Liu, Fu Ken

AU - Chang, Yu Cheng

AU - Ko, Fu-Hsiang

AU - Chu, Tieh Chi

AU - Dai, Bau Tong

PY - 2003/6

Y1 - 2003/6

N2 - This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method.

AB - This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method.

KW - Gold nanoparticles

KW - Rapid fabrication

KW - Self-assembled

KW - Spin coating

UR - http://www.scopus.com/inward/record.url?scp=18844474662&partnerID=8YFLogxK

U2 - 10.1016/S0167-9317(03)00175-8

DO - 10.1016/S0167-9317(03)00175-8

M3 - Conference article

AN - SCOPUS:18844474662

SN - 0167-9317

VL - 67-68

SP - 702

EP - 709

JO - Microelectronic Engineering

JF - Microelectronic Engineering

T2 - Proceedings of the 28th International Conference on MNE

Y2 - 16 September 2002 through 19 September 2002

ER -

Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

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