Rapid displacement sensor based on fitting scan

Zheng Jie Ye, Chi Hung Hwang, Pi-Ying Cheng, Chih Yen Chen, Chun Jen Weng*

*此作品的通信作者

    研究成果: Conference contribution同行評審

    3 引文 斯高帕斯(Scopus)

    摘要

    A rapid displacement sensor with a varifocal lens based on a method of fitting scan is proposed for 3D surface profiling. The focal length of the varifocal lens can be adjusted by varying the driving current. By detecting the reflective power of the reflected laser, the displacement can be obtained. By integrating a LabVIEW program based on a Levenberg-Marquardt algorithm in this system, the measuring speed can be substantially improved. Finally, the 3D surface profile of a step-height sample was successfully scanned by this displacement sensor.

    原文English
    主出版物標題I2MTC 2016 - 2016 IEEE International Instrumentation and Measurement Technology Conference
    主出版物子標題Measuring the Pulse of Industries, Nature and Humans, Proceedings
    發行者Institute of Electrical and Electronics Engineers Inc.
    ISBN(電子)9781467392204
    DOIs
    出版狀態Published - 22 七月 2016
    事件2016 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2016 - Taipei, Taiwan
    持續時間: 23 五月 201626 五月 2016

    出版系列

    名字Conference Record - IEEE Instrumentation and Measurement Technology Conference
    2016-July
    ISSN(列印)1091-5281

    Conference

    Conference2016 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2016
    國家/地區Taiwan
    城市Taipei
    期間23/05/1626/05/16

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