Rapid and accurate extraction of optical parameters for uniaxial bulk media by phase modulated ellipsometry

Chun I. Chuang, Shiuan-Huei Lin, Yu Faye Chao*

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

An improved phase modulated technique has been implemented to increase the speed and accuracy of optical parameters extraction for a uniaxial bulk media. In combination of the genetic algorithm, we show that not only the complex refractive indices, the inclination and azimuth angles of optical axis can also be extracted. Furthermore, by using a two-probe-beam configuration, the speed of convergence can be improved by 5-times. Such a high speed and accurate method can be applied for the in-situ measurement of dynamic materials.

原文English
頁(從 - 到)861-866
頁數6
期刊Optics and Lasers in Engineering
51
發行號7
DOIs
出版狀態Published - 1 7月 2013

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