TY - JOUR
T1 - Process development and impurities analysis for the bottom antireflective coating material
AU - Ko, Fu-Hsiang
AU - Chen, H. L.
AU - Huang, T. Y.
AU - Cheng, H. C.
AU - Ko, C. J.
AU - Chu, T. C.
PY - 2001
Y1 - 2001
N2 - The optical behaviour of semiconductor bottom antireflective coating (BARC) material was investigated by both the measurement and simulation methods. The effects of spin-coating rate, interface refection, BARC layer thickness and photoresist layer thickness were studied. Our results indicated that the 62.5 nm of BARC layer had strong effect on suppressing the light reflection of wavelength of 248 nm from the wafer surface, irrespective of the photoresist layer thickness. Based on the gravimetric method, a high throughput and one-step microwave digestion procedure was developed for the BARC materials. The digestion efficiency increased with the digestion duration and the temperature. By following the established one-step microwave digestion method and inductively coupled plasma mass spectrometry determination, the detection limits obtained for Cr, Ni, Cu, Zn and Pb were in 0.1 to 1.11 ppb levels. The spike recoveries of the metallic impurities were in the range 86-102% for the BARC materials. The analytical results of the BARC samples were found to be in reasonably good agreement with our previous method, and the analytical throughput can achieve up to 20 samples per hour for the analysis of 5 elements.
AB - The optical behaviour of semiconductor bottom antireflective coating (BARC) material was investigated by both the measurement and simulation methods. The effects of spin-coating rate, interface refection, BARC layer thickness and photoresist layer thickness were studied. Our results indicated that the 62.5 nm of BARC layer had strong effect on suppressing the light reflection of wavelength of 248 nm from the wafer surface, irrespective of the photoresist layer thickness. Based on the gravimetric method, a high throughput and one-step microwave digestion procedure was developed for the BARC materials. The digestion efficiency increased with the digestion duration and the temperature. By following the established one-step microwave digestion method and inductively coupled plasma mass spectrometry determination, the detection limits obtained for Cr, Ni, Cu, Zn and Pb were in 0.1 to 1.11 ppb levels. The spike recoveries of the metallic impurities were in the range 86-102% for the BARC materials. The analytical results of the BARC samples were found to be in reasonably good agreement with our previous method, and the analytical throughput can achieve up to 20 samples per hour for the analysis of 5 elements.
KW - Antireflective coating
KW - BARC material analysis
KW - One-step microwave digestion
KW - Surface reflection
UR - http://www.scopus.com/inward/record.url?scp=0034768320&partnerID=8YFLogxK
U2 - 10.1117/12.436779
DO - 10.1117/12.436779
M3 - Conference article
AN - SCOPUS:0034768320
SN - 0277-786X
VL - 4344
SP - 562
EP - 571
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Metrology, Inspection, and Process Control for Microlithography XV
Y2 - 26 February 2001 through 1 March 2001
ER -