Prioritization of key in-line process parameters for electrical characteristic optimization of high-k metal gate bulk FinFET devices

Ping Husn Su, Yi-ming Li

研究成果: Conference contribution同行評審

指紋

深入研究「Prioritization of key in-line process parameters for electrical characteristic optimization of high-k metal gate bulk FinFET devices」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds