Porous materials with ultra-low optical constants for integrated optical devices applications

H. L. Chen*, C. P. Chang, C. C. Cheng, C. I. Hsieh, W. S. Wang, Po-Tsun Liu

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

The optical characteristics such as, ultra-low optical constants, for porous MSQ films, and epoxy based SU-8 resist were investigated for integrated optical devices applications. The refractive index of porous MSQ is found to decrease to around 1.320 as the hydration time exceed 24 hours. The measure refractive index is about 1.163 at 1550 nm wavelength. It is found that due to low refractive index and low absorption in the large spectra regimes, porous MSQ films would be cladding materials.

原文English
主出版物標題Digest of Papers - Microprocesses and Nanotechnology 2004
發行者The Japan Society of Applied Physics
頁面180-181
頁數2
ISBN(列印)4990247205, 9784990247201
DOIs
出版狀態Published - 26 10月 2004
事件2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
持續時間: 26 10月 200429 10月 2004

出版系列

名字Digest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
國家/地區Japan
城市Osaka
期間26/10/0429/10/04

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