@article{f1599e4428ba465d8eba64eb3de316fb,
title = "Poly-oxide/poly-Si/SiO2/Si structure for ellipsometry measurement",
abstract = "A multiple poly-oxide/poly-Si/SiO2/Si sandwiched structure is proposed for the conventional single incident angle and single wavelength ellipsometry measurement of the thicknesses and refractive indices of the poly-oxide and the poly-Si at the same time. The structure is simple and gives accurate results.",
keywords = "Elliposometry, Measurement, Thin films",
author = "Tien-Sheng Chao and Lee, {C. L.} and Lei, {T. F.} and Yen, {Y. T.}",
year = "1992",
month = jun,
day = "4",
doi = "10.1049/el:19920722",
language = "English",
volume = "28",
pages = "1144--1145",
journal = "Electronics Letters",
issn = "0013-5194",
publisher = "Institution of Engineering and Technology",
number = "12",
}