@inproceedings{fced780ea61b43cabf90273ad7f3da60,
title = "Polarized optical scattering measurements of metallic nanoparticles on a thin film silicon wafer",
abstract = "Light scattering has shown its powerful diagnostic capability to characterize optical quality surfaces. In this study, the theory of bidirectional reflectance distribution function (BRDF) was used to analyze the metallic nanoparticles' sizes on wafer surfaces. The BRDF of a surface is defined as the angular distribution of radiance scattered by the surface normalized by the irradiance incident on the surface. A goniometric optical scatter instrument has been developed to perform the BRDF measurements on polarized light scattering on wafer surfaces for the diameter and distribution measurements of metallic nanoparticles. The designed optical scatter instrument is capable of distinguishing various types of optical scattering characteristics, which are corresponding to the diameters of the metallic nanoparticles, near surfaces by using the Mueller matrix calculation. The metallic nanoparticle diameter of measurement is 60 nm on 2 inch thin film wafers. These measurement results demonstrate that the polarization of light scattered by metallic particles can be used to determine the size of metallic nanoparticles on silicon wafers.",
keywords = "Goniometer, Light-scattering measurement, Metallic nanoparticle, Thin film",
author = "Liu, {Cheng Yang} and Liu, {Tze An} and Fu, {Wei En}",
year = "2009",
doi = "10.1063/1.3251221",
language = "English",
isbn = "9780735407121",
series = "AIP Conference Proceedings",
pages = "203--206",
booktitle = "Frontiers of Characterization and Metrology for Nanoelectronics - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics",
note = "2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics ; Conference date: 11-05-2009 Through 15-05-2009",
}