Physical characteristics of photo-sensitive sol-gel derived PZT films for microcantilever

A direct fine-patterning process using photosensitive gel film derived from PZT precursor solution has been used to fabricate the piezoelectric cantilever from lead acetate trihydrate, zirconium n-propoxide and titanium isopropoxide modified with onitrobenzyl alcohol (NBA). Two main heating schedules were used to investigate the effect of various NBA amounts on microstructure, surface morphologies, and electrical properties of PZT films. As NBA was added above 1 wt%, it shows detrimental effect on crystal phase, microstructure evolution and electrical properties of PZT films. With increasing NBA content, both pyrochlore phase and pore formation was promoted. However, prior to next coating, a pre-pyrolysis is required to reduce the pore formation and obtain good piezoelectric characteristics. The mechanical coupling k31 measured for PZT micro-cantilever is about 0.26 which is comparable to those reported for bulk ceramics.