Photovoltaic effect on the conductive atomic force microscopic characterization of thin dielectric films

M. N. Chang*, C. Y. Chen, M. J. Yang, Chao-Hsin Chien

*此作品的通信作者

    研究成果: Article同行評審

    6 引文 斯高帕斯(Scopus)

    摘要

    The authors have used front-wing conductive probes to investigate the photovoltaic effect on the conductive atomic force microscopic (C-AFM) characterization of thin dielectric films. The surface photovoltage induced by the laser beam of an atomic force microscope can enhance the electrical field across the studied dielectric film, decreasing the onset voltage of the leakage current, resulting in a modified C-AFM image with a larger current distribution. Moreover, the experimental results also revealed that the influence of the photovoltaic effect on C-AFM would be more significant for dielectric films that are grown on a substrate with a higher carrier concentration.

    原文English
    文章編號133109
    期刊Applied Physics Letters
    89
    發行號13
    DOIs
    出版狀態Published - 6 10月 2006

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