Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

Tsan Wen Lu; Pin Tso Lin; Po Tsung Lee

doi:10.1364/OL.37.000569

Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

Tsan Wen Lu, Pin Tso Lin, Po Tsung Lee^*

^*此作品的通信作者

光電工程學系

研究成果: Article › 同行評審

23 引文斯高帕斯（Scopus）

摘要

We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO₂ slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 10⁷ and 0.176 half-wavelength cubic of the horizontally SiO ₂-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO₂ nanolaser. This horizontal SiO₂ slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

原文	English
頁（從 - 到）	569-571
頁數	3
期刊	Optics Letters
卷	37
發行號	4
DOIs	https://doi.org/10.1364/OL.37.000569
出版狀態	Published - 15 2月 2012

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10.1364/OL.37.000569

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abstract = "We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 107 and 0.176 half-wavelength cubic of the horizontally SiO 2-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO2 nanolaser. This horizontal SiO2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.",

author = "Lu, {Tsan Wen} and Lin, {Pin Tso} and Lee, {Po Tsung}",

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AU - Lu, Tsan Wen

AU - Lin, Pin Tso

AU - Lee, Po Tsung

PY - 2012/2/15

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N2 - We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 107 and 0.176 half-wavelength cubic of the horizontally SiO 2-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO2 nanolaser. This horizontal SiO2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

AB - We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 107 and 0.176 half-wavelength cubic of the horizontally SiO 2-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO2 nanolaser. This horizontal SiO2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

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JO - Optics Letters

JF - Optics Letters

IS - 4

ER -

Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

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