Photo-leakage-current characteristic of F incorporated hydrogenated amorphous silicon thin film transistor

M. C. Wang, T. C. Chang*, Po-Tsun Liu, S. W. Tsao, J. R. Chen

*此作品的通信作者

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

The photo-leakage-current (IPLC) characteristic of F incorporated a-Si:H thin film transistor (TFT) has been studied. The device activation energy (Ea) of a-Si:H (:F) TFTs is higher than those of typical a-Si:H TFTs, and resulted in the shift down of Fermi level in a-Si:H (:F). Experimental results show that the IPLC of a-Si:H (:F) TFTs is smaller than that of conventional a-Si:H TFTs in the density of states limited region, stemmed from the higher recombination centers present in a-Si:H (:F) material. However, the higher IPLC is observed in the hole conduction region, resulted from the larger Ea in the a-Si:H (:F) TFTs.

原文English
文章編號192114
頁數3
期刊Applied Physics Letters
90
發行號19
DOIs
出版狀態Published - 2007

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