Performance improvement of CoTiO3 high-k dielectrics with nitrogen incorporation

Jian Hao Chen*, Tzung Bin Huang, Xiaohua Wu, Dolf Landheer, Tan Fu Lei, Tien-Sheng Chao

*此作品的通信作者

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds