@inproceedings{94fc9c0bed414552acef291d38a7429c,
title = "Passivation of defects in a-Si:H TFTs with 150°C supercritical fluids",
abstract = "In this study, the supercritical fluids act the transporter and deliver H2O molecule into the a-Si:H film for repairing defects. From experiment results, superior transfer characteristic is obtained after the treatment of supercritical fluids mixed with water and propyl-alcohol. Besides, density of states is also reduced significantly during this processing.",
author = "Yang, {Po Yu} and Po-Tsun Liu and Chang, {Ting Chang} and Cheng, {Yi Li}",
year = "2007",
month = jul,
language = "English",
isbn = "9789572852248",
series = "IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings",
pages = "500--502",
booktitle = "IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings",
note = "International Display Manufacturing Conference and Exhibition, IDMC 2007 ; Conference date: 03-07-2007 Through 06-07-2007",
}