Parameter extraction of resistive thermal microsensors by AC electrical method

Yang-Mang Ou*, Chin Shown Sheen, Jin Shown Shie

*此作品的通信作者

研究成果: Article同行評審

15 引文 斯高帕斯(Scopus)

摘要

Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an ac electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods.

原文English
頁(從 - 到)403-408
頁數6
期刊IEEE Transactions on Instrumentation and Measurement
47
發行號2
DOIs
出版狀態Published - 1998

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