摘要
A model has previously been proposed for predicting the voltage and temperature dependence of oxide lifetime. It is now extended to incorporate the effects of burn-in voltage, temperature, and time on the subsequent lifetime of the oxide. Based on this model and simple ramp-breakdown measurement, burn-in conditions can be optimized to obtain a low burn-in yield loss while meeting a desired reliability requirement.
原文 | English |
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頁(從 - 到) | 77-78 |
頁數 | 2 |
期刊 | Digest of Technical Papers - Symposium on VLSI Technology |
出版狀態 | Published - 1 12月 1989 |
事件 | Ninth Symposium on VLSI Technology 1989 - Digest of Technical Papers - Kyoto, Jpn 持續時間: 22 5月 1989 → 25 5月 1989 |