Out-of-plane CMOS-MEMS resonator with electrostatic driving and piezoresistive sensing

Jin-Chern Chiou, Y. J. Lin, L. J. Shieh

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

摘要

In this paper, a prestress vertical comb drive resonator with piezoresisted sensor is developed. The proposed resonator consists of a set of comb fingers fabricated along the composite beam. One end of the composite beam is clamped to the anchor, whereas the other end is elevated vertically by the residual stress. The actuation occurs when the electrostatic force, induced by the fringe effect, pulls the composite beam downward to the substrate. The piezoresistor is designed to sense the vertical vibration frequency of the resonator. The device is fabricated through a standard 0.35μm 2P4M CMOS-MEMS process. The measurement results indicated that the resonant frequency of the device is 14.5 kHz, and the quality factor is about 36.

原文English
主出版物標題2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
頁面929-932
頁數4
DOIs
出版狀態Published - 1 12月 2006
事件2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 - Cincinnati, OH, United States
持續時間: 17 6月 200620 6月 2006

出版系列

名字2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
2

Conference

Conference2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
國家/地區United States
城市Cincinnati, OH
期間17/06/0620/06/06

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