Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer

Shao Kang Hung*, Yu Hsin Chung, Cheng Lung Chen, Kai Hung Chang

*此作品的通信作者

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

摘要

The mirror galvanometer is a crucial component of laser cutters/engravers. Novel two-dimensional mirror galvanometers demonstrate less trajectory distortion than traditional one-dimensional ones. This article proposes an optoelectronic sensor that measures a mirror’s inclinations in two dimensions simultaneously. The measuring range, resolution, and sampling rate are ±10, 0.0265, and 2 kHz, respectively. With the proposed sensor, a closed-loop control can be further implemented to achieve precision laser machining. Its compact size and low cost meet the requirements of miniature laser engravers, which have become popular in recent years.

原文English
文章編號872
期刊Sensors
22
發行號3
DOIs
出版狀態Published - 1 2月 2022

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