Optimum conditions for novel one-step cleaning method for pre-gate oxide cleaning using robust design methodology

Tung Ming Pan, Tan Fu Lei, Tien-Sheng Chao, Ming Chi Liaw, Chih Peng Lu

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

A novel one-step cleaning method has been developed for pre-gate-oxide cleaning to replace the conventional RCA two-step cleaning process. Tetramethyl ammonium hydroxide (TMAH) and ethylenediamine tetraacetic acid (EDTA) are added into the RCA SC-1 cleaning solution to enhance cleaning efficiency. We adapt a robust design methodology (Genichi Taguchi method) to analyze the results of our experiments. Using this novel method, it is found that the optimum conditions are A1B2C1D1 (A1: TMAH:NH4OH = 1:50, B2: EDTA concentration is 100 ppm, C1: cleaning time is 5 min, and D1: cleaning temperature is 60°C). This novel one-step cleaning method is very promising for future large-sized silicon wafer cleaning processes because it has the advantages of reduced processing time and temperature, cost reduction due to reduced chemical usage and improved performance.

原文English
頁(從 - 到)5805-5808
頁數4
期刊Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
39
發行號10
DOIs
出版狀態Published - 10月 2000

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