Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD

Q. Yang, Q. J. Hartmann, A. P. Curtis, Chun-Hsiung Lin, D. A. Ahmari, D. Scott, Hao-Chung Kuo, Haydn Chen, G. E. Stillman

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

We studied the effect of group V switching times on the formation of interfacial layers in InGaP/GaAs heterostructures grown by LP-MOCVD using low temperature photoluminescence (PL), double crystal X-ray diffraction (DCXRD) and high resolution transmission electron microscopy (HRTEM). Due to the severe substitution process of P by As, the quality of InGaP-to-GaAs interface was very sensitive to switching times. By optimizing the switching conditions, we were able to minimize the interfacial layers to one monolayer (ML) of In0.5Ga0.5As at the GaAs-to-InGaP interface and 1 ML of In0.65Ga0.15P0.15As0.85 at the InGaP-to-GaAs interface. Heterojunction bipolar transistors (HBTs) grown using this switching scheme showed excellent etch selectivity as well as dc characteristics.

原文English
主出版物標題Proceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997
編輯Mike Melloch, Mark A. Reed
發行者Institute of Electrical and Electronics Engineers Inc.
頁面95-98
頁數4
ISBN(列印)0780338839, 9780780338838
DOIs
出版狀態Published - 1997
事件24th IEEE International Symposium on Compound Semiconductors, ISCS 1997 - San Diego, 美國
持續時間: 8 9月 199711 9月 1997

出版系列

名字Proceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997

Conference

Conference24th IEEE International Symposium on Compound Semiconductors, ISCS 1997
國家/地區美國
城市San Diego
期間8/09/9711/09/97

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