Optical-gradient type of antireflective coatings for sub-70 nm optical lithography applications

H. L. Chen, Wonder Fan, T. J. Wang, Fu-Hsiang Ko, R. S. Zhai, C. K. Hsu, T. J. Chuang

研究成果: Conference contribution同行評審

摘要

We demonstrate an optical-gradient bottom antireflective coating film, which is prepared by a silicon nitride film treated with oxygen plasma. Results indicate that the optical-gradient type film is suitable for sub-70 nm optical lithography applications.

原文English
主出版物標題CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
主出版物子標題Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁數1
ISBN(電子)0780377664
DOIs
出版狀態Published - 1 1月 2003
事件5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
持續時間: 15 12月 200319 12月 2003

出版系列

名字Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
2

Conference

Conference5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
國家/地區Taiwan
城市Taipei
期間15/12/0319/12/03

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