摘要
We demonstrated a laser diode position sensor for a near-field height control system. The feedback signal of the laser diode sensor that resulted from self-mixing interferometry was characterized and modeled by a simplified method. Due to the fine spatial resolution of the laser sensor, an active height control system with nanoscale position precision was designed and realized under a spinning disk for near-field applications.
原文 | English |
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頁(從 - 到) | 3704-3709 |
頁數 | 6 |
期刊 | Journal of Lightwave Technology |
卷 | 25 |
發行號 | 12 |
DOIs | |
出版狀態 | Published - 2007 |