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On-wafer UV sensor and prediction of UV irradiation damage
Seiji Samukawa
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此作品的通信作者
電信工程研究所
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深入研究「On-wafer UV sensor and prediction of UV irradiation damage」主題。共同形成了獨特的指紋。
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Keyphrases
UV Radiation
100%
On-wafer
100%
Radiation Damage
100%
UV Sensor
100%
Monitoring Method
71%
SiOC Film
57%
Plasma Processing
42%
Absolute Intensity
42%
UV Spectra
42%
UV Damage
42%
UV Photons
28%
Plasma Etching
14%
Neural Network
14%
Result Prediction
14%
Dielectric Film
14%
UV Intensity
14%
Prediction System
14%
Arbitrary Units
14%
Causes of Damage
14%
Surface Material
14%
Excimer Lamp
14%
Physics
Plasma Process
100%
Ultraviolet Spectrum
100%
Radiation Effect
66%
Neural Network
33%
Excimer
33%
Plasma Etching
33%
Dielectric Material
33%
Material Science
Film
100%
Surface (Surface Science)
75%
Radiation Damage
50%
Plasma Etching
25%
Dielectric Films
25%
Lamp
25%
Engineering
Monitoring Technique
100%
Plasma Applications
60%
Radiation Effect
40%
Induced Damage
20%
Excimer Lamp
20%
Dielectric Films
20%