Observation of dislocation etch pits in epitaxial lateral overgrowth GaN by wet chemical etching

Keyphrases

• Epitaxial Lateral Overgrowth 100%
• Dislocation 100%
• Chemical Etching 100%
• Etch pit 100%
• Window Area 33%
• Coalescent 33%
• Surface Topography 16%
• As-grown 16%
• Sulfuric Acid 16%
• Smooth Surface 16%
• SEM Images 16%
• High Density 16%
• Etchant 16%
• Phosphoric Acid 16%
• Hillocks 16%
• Hexagonal Structure 16%
• AFM Observation 16%
• Overgrowth 16%

Material Science

• Scanning Electron Microscopy 100%
• Wet Etching 100%
• Density 50%
• Surface (Surface Science) 50%
• Surface Topography 50%