@inproceedings{140aa2d00a5044d7b92d9911d6ec236a,
title = "Novel pH sensor based on vertical silicon nanowire electrilyte-insulator- semiconductor structure",
abstract = "The vertical silicon nanowire (SiNW) platforms are candidates for use in ultrasensitive biosensor, that surface to volume ratio higher than one dimensional silicon nanowire. In this paper, a novel vertical silicon nanowire electrolyte-insulator-semiconductor (EIS) structure with an ALD-HfO2 sensing membrane is proposed for the first time for use in a hydrogen ion sensor. Hafnium dioxide is used as the sensing membrane, which deposited on the surface of the vertical SiNW structure by atomic layer deposition. The sensing properties were examined using an HP4284A LCR analyzer. A linear relationship was found between the flatband voltage shift and the hydrogen ion concentration. A postdeposition rapid thermal annealing (RTA) was utilized to optimize the sensing properties, and the sensitivity was increased to 51.7 mV/pH.",
author = "Lin, \{Yi Ting\} and Yu, \{Yu Hong\} and Chang, \{Tzu Chien\} and Yu Chen and Zhang, \{Guo Jun\} and Zhu, \{Shi Yang\} and Lai, \{Chao Sung\}",
year = "2011",
doi = "10.3850/978-981-08-7615-9-BS03",
language = "English",
isbn = "9789810876159",
series = "ISOB 2011 - Proceedings of the 1st International Symposium ISOB 2011 - Proceedings of the 1st International Symposium on Bioengineering",
pages = "16--21",
booktitle = "ISOB 2011 - Proceedings of the 1st International Symposium on Bioengineering",
note = "1st International Symposium on Bioengineering, ISOB 2011 ; Conference date: 19-01-2011 Through 19-01-2011",
}