Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

Padmanabh Pundrikaksha Pancham; Anupam Mukherjee; Boong Lek Yuan; Peichen Yu; Wen Hsin Chiu; Gufran Ahmad; Sandipan Mallik; Cheng Yao Lo

doi:10.1109/LSENS.2023.3265702

Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

Padmanabh Pundrikaksha Pancham, Anupam Mukherjee, Boong Lek Yuan, Peichen Yu, Wen Hsin Chiu, Gufran Ahmad, Sandipan Mallik, Cheng Yao Lo^*

^*此作品的通信作者

光電工程學系

研究成果: Article › 同行評審

3 引文斯高帕斯（Scopus）

摘要

In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

原文	English
文章編號	2000504
期刊	IEEE Sensors Letters
卷	7
發行號	5
DOIs	https://doi.org/10.1109/LSENS.2023.3265702
出版狀態	Published - 1 5月 2023

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title = "Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS",

abstract = "In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.",

keywords = "Sensor materials, capacitive pressure sensor, chemical vapor deposition, graphene, polydimethylsiloxane (PDMS)",

author = "Pancham, {Padmanabh Pundrikaksha} and Anupam Mukherjee and Yuan, {Boong Lek} and Peichen Yu and Chiu, {Wen Hsin} and Gufran Ahmad and Sandipan Mallik and Lo, {Cheng Yao}",

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doi = "10.1109/LSENS.2023.3265702",

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T1 - Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

AU - Pancham, Padmanabh Pundrikaksha

AU - Mukherjee, Anupam

AU - Yuan, Boong Lek

AU - Yu, Peichen

AU - Chiu, Wen Hsin

AU - Ahmad, Gufran

AU - Mallik, Sandipan

AU - Lo, Cheng Yao

PY - 2023/5/1

Y1 - 2023/5/1

N2 - In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

AB - In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

KW - Sensor materials

KW - capacitive pressure sensor

KW - chemical vapor deposition

KW - graphene

KW - polydimethylsiloxane (PDMS)

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DO - 10.1109/LSENS.2023.3265702

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JO - IEEE Sensors Letters

JF - IEEE Sensors Letters

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M1 - 2000504

ER -

Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

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