Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy

Wen Chuan Kuo*, Fu Jay Juang, Hong Ren Su, Mei Li Hsieh

*此作品的通信作者

研究成果: Article同行評審

摘要

In this study, the authors evaluated the effectiveness of using the nanometer depth sensitivity of differential confocal microscopy (DCM) to measure the surface profile of the two-dimensional (2D) photonic crystal structure. The depth of the micropore on the 2D hexagonal photonic crystal sample can be measured within 4.2 nm resolution. The surface profile of the 2D photonic crystal structure on the photoresist can be obtained by the nondestructive and noncontact DCM method, and the results were comparable to those from the commercial atomic force microscope method.

原文English
頁(從 - 到)1805-1808
頁數4
期刊Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
27
發行號4
DOIs
出版狀態Published - 2009

指紋

深入研究「Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy」主題。共同形成了獨特的指紋。

引用此