NO gas sensor based on ZnGa 2 O 4 epilayer grown by metalorganic chemical vapor deposition

Min Ru Wu; Wei Zhong Li; Chun Yi Tung; Chiung Yi Huang; Yi Hung Chiang; Po Liang Liu; Ray-Hua Horng

doi:10.1038/s41598-019-43752-z

NO gas sensor based on ZnGa ₂ O ₄ epilayer grown by metalorganic chemical vapor deposition

Min Ru Wu, Wei Zhong Li, Chun Yi Tung, Chiung Yi Huang, Yi Hung Chiang, Po Liang Liu, Ray-Hua Horng^*

^*此作品的通信作者

研究成果: Article › 同行評審

76 引文斯高帕斯（Scopus）

摘要

A gas sensor based on a ZnGa ₂ O ₄ (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to 6.25 ppm of NO and its response time is 57 s. Besides that, the sensitivities are 1.18, 1.27, 1.06, and 1.00 when exposed to NO ₂ (500 ppb), SO ₂ (125 ppm), CO (125 ppm), and CO ₂ (1500 ppm), respectively. These results imply that the ZGO gas sensor not only has high sensitivity, but also has great selectivity for NO gas. Moreover, the obtained results suggest that ZGO sensors are suitable for the internet of things(IOT) applications.

原文	English
文章編號	7459
期刊	Scientific reports
卷	9
發行號	1
DOIs	https://doi.org/10.1038/s41598-019-43752-z
出版狀態	Published - 1 12月 2019

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10.1038/s41598-019-43752-z

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title = "NO gas sensor based on ZnGa 2 O 4 epilayer grown by metalorganic chemical vapor deposition",

abstract = " A gas sensor based on a ZnGa 2 O 4 (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to 6.25 ppm of NO and its response time is 57 s. Besides that, the sensitivities are 1.18, 1.27, 1.06, and 1.00 when exposed to NO 2 (500 ppb), SO 2 (125 ppm), CO (125 ppm), and CO 2 (1500 ppm), respectively. These results imply that the ZGO gas sensor not only has high sensitivity, but also has great selectivity for NO gas. Moreover, the obtained results suggest that ZGO sensors are suitable for the internet of things(IOT) applications.",

author = "Wu, {Min Ru} and Li, {Wei Zhong} and Tung, {Chun Yi} and Huang, {Chiung Yi} and Chiang, {Yi Hung} and Liu, {Po Liang} and Ray-Hua Horng",

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doi = "10.1038/s41598-019-43752-z",

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T1 - NO gas sensor based on ZnGa 2 O 4 epilayer grown by metalorganic chemical vapor deposition

AU - Wu, Min Ru

AU - Li, Wei Zhong

AU - Tung, Chun Yi

AU - Huang, Chiung Yi

AU - Chiang, Yi Hung

AU - Liu, Po Liang

AU - Horng, Ray-Hua

PY - 2019/12/1

Y1 - 2019/12/1

N2 - A gas sensor based on a ZnGa 2 O 4 (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to 6.25 ppm of NO and its response time is 57 s. Besides that, the sensitivities are 1.18, 1.27, 1.06, and 1.00 when exposed to NO 2 (500 ppb), SO 2 (125 ppm), CO (125 ppm), and CO 2 (1500 ppm), respectively. These results imply that the ZGO gas sensor not only has high sensitivity, but also has great selectivity for NO gas. Moreover, the obtained results suggest that ZGO sensors are suitable for the internet of things(IOT) applications.

AB - A gas sensor based on a ZnGa 2 O 4 (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to 6.25 ppm of NO and its response time is 57 s. Besides that, the sensitivities are 1.18, 1.27, 1.06, and 1.00 when exposed to NO 2 (500 ppb), SO 2 (125 ppm), CO (125 ppm), and CO 2 (1500 ppm), respectively. These results imply that the ZGO gas sensor not only has high sensitivity, but also has great selectivity for NO gas. Moreover, the obtained results suggest that ZGO sensors are suitable for the internet of things(IOT) applications.

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NO gas sensor based on ZnGa 2 O 4 epilayer grown by metalorganic chemical vapor deposition

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NO gas sensor based on ZnGa ₂ O ₄ epilayer grown by metalorganic chemical vapor deposition