Nitrogen-related enhanced reliability degradation in nMOSFETs with 1.6 nm gate dielectric
Ching Wei Chen, Chao-Hsin Chien, Shih Chich Ou, Tsu Hsiu Perng, Da Yuan Lee, Yi Cheng Chen, Horng-Chih Lin, Tiao Yuan Huang, Chun Yen Chang
研究成果: Conference contribution › 同行評審