NiFe-AAO nanocomposite for performance enhancement of on-chip spiral inductors

Tzu Yuan Chao*, H. F. Hsu, K. M. Chen, Yu-Ting Cheng

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

The paper presents a CMOS-compatible process to implement NiFe-anodic alumina oxide (AAO) nanocomposite material as a magnetic core for on-chip spiral inductor fabrication. The NiFe nanorod array with ∼70 nm in diameter and an aspect ratio of ∼14 is electroplated using Ti as a conductive layer in an anodic alumina oxide (AAO) template on a silicon substrate. Experimental results show that the spiral inductor using a NiFe-AAO nanocomposite magnetic core can have more than 25% inductance enhancement without any Q degradation to GHz range.

原文English
主出版物標題2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
頁面2686-2689
頁數4
DOIs
出版狀態Published - 1 九月 2011
事件2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
持續時間: 5 六月 20119 六月 2011

出版系列

名字2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
國家/地區China
城市Beijing
期間5/06/119/06/11

指紋

深入研究「NiFe-AAO nanocomposite for performance enhancement of on-chip spiral inductors」主題。共同形成了獨特的指紋。

引用此