New patterning application for pentacene-based OTFTs by self-assembly monolayer (SAM) material

Hsiao-Wen Zan*, Cheng Wei Chou, Kuo Hsi Yen, Ting Yuan Tu, Yu Min Chiou

*此作品的通信作者

研究成果: Conference article同行評審

摘要

A patterning method for pentacene film is proposed. This method was realized self-assembled layer (SAM) and ultra-violet (UV) light post-exposure. The surface characteristic on the gate dielectric is controlled. The difference of the interfacial binding energy between the pentacene film and the dielectric enables the pentacene film to be removed selectively. The remaining pentacene film was fabricated as a top-contact OTFT to confirm the practicability of this technology. The performance kept favorable and superior to that of the control sample. The mobility, the on/off current ratio and the sub-threshold swing were also improved.

原文English
頁(從 - 到)90-92
頁數3
期刊SID Conference Record of the International Display Research Conference
出版狀態Published - 9月 2006
事件SID 26th International Display Research Conference - Kent, OH, 美國
持續時間: 18 9月 200621 9月 2006

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