@inproceedings{751ca36313374edf96eaf14fef207a29,
title = "Nanofabrication for multi states of Ge2Sb2Te5 by femto-seond laser induced forward transfer",
abstract = "The nano patterns of phase-change material Ge2Sb2Te5 are fabricated by the femto-second laser-induced forward transfer method. The size and the phase state of the Ge2Sb2Te5 patterns can be effectively controlled by varying the applied laser fluence and film thickness. Also, the multilevel electronic states of fabricated patterns are observed through the conductive-atomic force microscopy. This research has great potential in the area of the optical and the electrical data storage.",
author = "Ming-Lun Tseng and Chen, {Bo Han} and Chu, {Cheng Hung} and Chang, {Chia Min} and Chiang, {Hai Pang} and Tsai, {Din Ping}",
year = "2011",
month = jul,
day = "17",
doi = "10.1364/ISOM_ODS.2011.OTuD21",
language = "English",
isbn = "9781557529152",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of American (OSA)",
booktitle = "Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011",
note = "Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011 ; Conference date: 17-07-2011 Through 20-07-2011",
}