Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation

Hung Yuan Chang, Yew Chung Sermon Wu, Chia He Chang, Kun Lin Lin*, Abhijeet Joshi, Bulent M. Basol

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3 引文 斯高帕斯（Scopus）

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science