MULTIPHOTON IONIZATION MASS SPECTROMETRY AS A MECHANISTIC PROBE OF CHEMICAL VAPOR DEPOSITION.

D. W. Squire*, C. S. Dulcey, Ming-Chang Lin

*此作品的通信作者

研究成果: Conference contribution同行評審

3 引文 斯高帕斯(Scopus)

摘要

The low pressure pyrolysis of alkylmetals on conducting, semiconducting and non-conducting surfaces was studied using multiphoton and electron ionization analysis. No products of surface radical recombination (such as CH//4 and C//2H//6) could be seen under the conditions employed. The activation energy for gas phase methyl radical production is 30 kcal/mol for trimethylgallium compared with 13 plus or minus 2 kcal/mol observed for trimethylaluminum decomposition. A deposition mechanism is proposed.

原文English
主出版物標題LIA (Laser Institute of America)
發行者Laser Inst of America
頁面148-151
頁數4
ISBN(列印)0912035293
DOIs
出版狀態Published - 1 12月 1985

出版系列

名字LIA (Laser Institute of America)
49

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