@inproceedings{7bf5127051084347acdb948250249167,
title = "Multi-sensory combined integrated low power tunable-gain interface circuit",
abstract = "This paper presents MEMS multi-sensors with low power tunable-gain interface circuit that can be monolithically integrated in the ASIC compatible standard CMOS process. A high gain ultra-low power sustaining TIA amplifier circuit with PLL compactly has been integrated with the resonator-based core sensing structure. The proposed low-power readout circuit adopts Correlated Double Sampling (CDS) to suppress low frequency noise and compensate DC offset. The gyroscope sensitivity is designed to be 1.8 aF/°/sec within ±100 °/sec. The tunable sensitivity can be adjusted from 28 mV/fF to 224 mV/fF by fully-differential programmable-gain amplifier (PGA). The interface circuit has 61.12dB SNR under 500 KHz sampling rate.",
keywords = "CMOS MEMS sensor, Correlated Double Sampling, Gyroscope, Interface Circuit, Readout, Silicon resonator, Tunable-Gain",
author = "Tung, {Chun Te} and Kuei-Ann Wen",
year = "2017",
month = may,
day = "4",
doi = "10.1109/CSTIC.2017.7919876",
language = "English",
series = "China Semiconductor Technology International Conference 2017, CSTIC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Steve Liang and Ying Shi and Ru Huang and Qinghuang Lin and David Huang and Hanming Wu and Yuchun Wang and Cor Claeys and Kafai Lai and Ying Zhang and Peilin Song and Viyu Shi and Zhen Guo",
booktitle = "China Semiconductor Technology International Conference 2017, CSTIC 2017",
address = "United States",
note = "null ; Conference date: 12-03-2017 Through 13-03-2017",
}