Multi Heat-Sink CMOS-BEOL Integrated MEMS Pirani Gauge for Vacuum Detection in Packaged Microsensors

Manu Garg, Fang Wei Tsai, Sushil Kumar, Yi Chiu*, Pushpapraj Singh

*此作品的通信作者

研究成果: Conference contribution › 同行評審

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Keyphrases

Engineering

Chemistry

Chemical Engineering

Material Science