@inproceedings{8e9a67b88ea3488b94a2fba2d4cefe12,
title = "Multi Heat-Sink CMOS-BEOL Integrated MEMS Pirani Gauge for Vacuum Detection in Packaged Microsensors",
abstract = "A multi-heat sink based MEMS Pirani gauge integrated in the back-end-of-line (BEOL) CMOS layers is designed and developed. The sandwiched heater line (SiO2/M2/SiO2) is designed in a meander configuration for improved heating efficiency. Multi heat-sink based design offers improved sensitivity and the thinner heater line offers reduced solid conduction losses and a lower detection limit. In a fully monolithically integrable process, the given gauge can be employed to detect vacuum levels from 4.6 Pa to 106 Pa. Experimental results agree with the simulated response with a maximum error of 0.16 %. Moreover, the successive measurements on the same device show a maximum error of 0.026 %, thereby indicating excellent repeatability.",
keywords = "BEOL, CMOS-MEMS, MEMS, Pirani gauge, Vacuum detection",
author = "Manu Garg and Tsai, {Fang Wei} and Sushil Kumar and Yi Chiu and Pushpapraj Singh",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2173--2176",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "美國",
}