Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 mu m Process

Chih-Hsuan Lin*, Chao-Hung Song, Kuei-Ann Wen

*此作品的通信作者

研究成果: Article同行評審

摘要

A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide-semiconductor (CMOS) 0.18 mu m process. The readout circuit used the nested chopper, correlated double-sampling (CDS), noise reduction method; the frequency division multiplexing method; the time-division multiplexing method; and the calibration method. Sensing was performed by exciting the MEMS three-axis magnetometer at X/Y/Z axes mechanical resonant frequencies of 3.77/7.05/7.47 kHz, respectively. A modest die-level vacuum packaging resulted in in-plane and out-of-plane mechanical quality factors of 471-500 and 971-1000, respectively. The sensitivities of both the three-axis magnetometer with 2 mA driving current and the three-axis accelerometer were 7.1-10.7 uV/uT and 58.37-88.87 uV/ug. The resolutions of both the three-axis magnetometer with 2 mA driving current and three-axis accelerometer resolution were 44.06-87.46 nT/root Hz and 5.043-7.5 ng/root Hz. The resolution was limited by circuit noise equivalent acceleration (CNEM) and Brownian noise equivalent magnetic field (BNEM).

原文English
文章編號314
頁數22
期刊Micromachines
12
發行號3
DOIs
出版狀態Published - 三月 2021

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