MPI/MS detection of SiF and SiF2 radicals produced from the reaction of F2 and NF3 with silicon
J. A. Dagata*, D. W. Squire, C. S. Dulcey, D. S.Y. Hsu, Ming-Chang Lin
*此作品的通信作者
研究成果: Article › 同行評審
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引文
斯高帕斯(Scopus)