Monte-Carlo Modeling and Characterization of Switching Dynamics for Antiferroelectric/Ferroelectric HZO considering Mechanisms of Fatigue

Yu Chen Chen*, Kuo Yu Hsiang, Min Hung Lee, Pin Su*

*此作品的通信作者

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

We have conducted an NLS-based Monte-Carlo modeling and characterization for switching dynamics of fatigued antiferroelectric/ferroelectric (AFE/FE)HZO. We have modeled the domain pinning probability considering fatigue mechanisms mediated by oxygen vacancy and charge injection for each orthorhombic-phase and tetragonal-phase grains. Our model has been verified with experimental data, and can be beneficial for future AFE/FE memory applications.

原文English
主出版物標題2022 International Electron Devices Meeting, IEDM 2022
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1341-1344
頁數4
ISBN(電子)9781665489591
DOIs
出版狀態Published - 2022
事件2022 International Electron Devices Meeting, IEDM 2022 - San Francisco, 美國
持續時間: 3 12月 20227 12月 2022

出版系列

名字Technical Digest - International Electron Devices Meeting, IEDM
2022-December
ISSN(列印)0163-1918

Conference

Conference2022 International Electron Devices Meeting, IEDM 2022
國家/地區美國
城市San Francisco
期間3/12/227/12/22

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