Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures

F. Y. Kuo*, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K.A. Wen

*此作品的通信作者

    研究成果: Article同行評審

    15 引文 斯高帕斯(Scopus)

    摘要

    In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 {\mu }\text{m} 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.

    原文English
    文章編號7851031
    頁(從 - 到)214-218
    頁數5
    期刊IEEE Journal of the Electron Devices Society
    5
    發行號3
    DOIs
    出版狀態Published - 5月 2017

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