@inproceedings{88decd69d92a42209a760714071f3af7,
title = "Monolithic MEMS resonator based pressure sensor and readout design",
abstract = "A monolithic MEMS resonator based pressure sensor and monolithically integrated with TLA. (trans-impedance amplifier) readout circuitry has been fabricated in standard lp6m AISC process. Dependence of the quality factor and ambient pressures are well known to resonator designers and it will be feasible to integrate a quality factor readout circuitry to detect ambient pressure. By measuring the sample resonator, the air pressure changes from 100 Pa to 1600 Pa, the Q factor will change from 2566 to 452 with resonant frequency in 15.4 k Hz and the readout circuit is designed accordingly. The system power consumption is 332.82 (iiW with 1.8 V pow er supply and sensitive- is 0.0203 mV per Q.",
keywords = "ASIC/MEMS process, Pressure sensor, Resonator, TIA",
author = "Chuang, {Po Chun} and Kuei-Ann Wen",
year = "2016",
month = dec,
day = "27",
doi = "10.1109/ISOCC.2016.7799719",
language = "English",
series = "ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "17--18",
booktitle = "ISOCC 2016 - International SoC Design Conference",
address = "United States",
note = "null ; Conference date: 23-10-2016 Through 26-10-2016",
}