Monolithic integration of digital MEMS thermometer and temperature compensated RTC on 1P6M ASIC compatible CMOS MEMS process

Ching Wen Hsu, Kuei-Ann Wen

    研究成果: Conference contribution › 同行評審

    5 引文 斯高帕斯（Scopus）

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    Engineering & Materials Science

    Chemical Compounds