@inproceedings{9d532d163e7949d9b2f8106a053fe561,
title = "Monolithic integration of digital MEMS thermometer and temperature compensated RTC on 1P6M ASIC compatible CMOS MEMS process",
abstract = "A monolithic resonator based digital MEMS thermometer has been proposed. It is further integrated with Real time clock (RTC) to demonstrate multifunction design as thermometer and temperature compensation. The MEMS/ASIC combined SOC is fabricated on UMC 0.18μm 1P6M ASIC compatible CMOS MEMS process. The resonant frequency of thermometer has been simulated with sensitivity-18Hz/°C. The temperature dependency of RTC frequency is 13.15(ppm/°C) in a temperature range from 20 °C to 80 °C. Power consumption of the readout circuit is 440.3μW.",
keywords = "calibration, MEMS resonator, RTC, thermometer",
author = "Hsu, {Ching Wen} and Kuei-Ann Wen",
year = "2018",
month = oct,
day = "3",
doi = "10.1109/SMELEC.2018.8481316",
language = "English",
series = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "45--48",
booktitle = "2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings",
address = "United States",
note = "13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 ; Conference date: 15-08-2018 Through 17-08-2018",
}