Model based sub-resolution assist features using an inverse lithography method

Jue Chin Yu*, Pei-Chen Yu, Hsueh Yung Chao

*此作品的通信作者

研究成果: Conference article同行評審

8 引文 斯高帕斯(Scopus)

指紋

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Mathematics

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds