Mobility enhancement of MOSFETs on p-silicon (111) with in situ HF-vapor pre-gate oxide cleaning

Tien-Sheng Chao*, Yu Hsin Lin, Wen Luh Yang

*此作品的通信作者

研究成果: Article同行評審

指紋

深入研究「Mobility enhancement of MOSFETs on p-silicon (111) with in situ HF-vapor pre-gate oxide cleaning」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds